Труды КНЦ. Технические науки. – 2026. - № 2

5. Ma D., Deng Q., Liu H., Leng Y. Effect o f ion energy on the microstructure and properties o f titanium nitride thin films deposited by HPPMS. Coatings, 2021, Vol. 11, No. 5, рp. 579. D0I:10.3390/coatings11050579 6. Chung C. K., Chen Y. C. Plasma-induced surface modification for microelectromechanical systems. Thin Solid Films, 2007, Vol. 515, No. 10, pp. 4497-4501. D0I:10.1016/j.tsf.2006.11.029 7. 10Lang K., Gong X., Wei J., Zhou Z. Effect of plasma treatment on titanium surface microhardness and wear resistance. J. Appl. Phys., 2023, Vol. 133, No. 6, Article ID: 065303. D0I:10.1063/5.0133852 8. Yuan P., Chen M., Lu X., Yang H., Zhang H. Application of advanced surface modification techniques in titanium implants: strategies for antibacterial and osseointegration enhancement. J. Mater. Chem. B, 2024, Vol. 12, pp. 10516­ 10549. D0I:10.1039/D4TB00436K 9. Long S., Zhu J., Jing Y., He S., Cheng L., Shi Z. A comprehensive review of surface modification techniques for enhancing the biocompatibility of 3D printed titanium implants. Coatings, 2023, Vol. 13, No. 11, Article ID: 1917. D0I:10.3390/coatings13111917 10. Lieberman M. A., Lichtenberg A. J. Principles of Plasma Discharges and Materials Processing. Hoboken, Wiley, 2005, 728 p. 11. Tolk N. H., Ruzic D. N. Resonance-enhanced damage in crystal lattices under ion bombardment. Springer Handbook o f Surface Science. Berlin, Springer, 2020, pp. 313-328. D0I:10.1007/978-3-662-56925-1_9 12. Liu Y., Schuengel E., Korolov I., Donko Z., Wang Y.-N., Schulze J. Resonant striations in RF plasma due to ion- ion frequency matching. J. Vacuum Sci. & Technol. A, 2016, Vol. 34, No. 2, p. 021302. D0I:10.1116/1.4942009 13. Logvin V. A., Tereshko I. V., Sheptunov S. A. Izmenenie dislokatsionnoi struktury a-Fe v rezul’tate vozdeistviya tleyushchego razryada [Change in the dislocation structure of a-Fe under glow discharge exposure]. Vestnik Bryanskogo gosudarstvennogo tekhnicheskogo universiteta [Bulletin of Bryansk State Technical University], 2018, No. 3, pp. 47-56. (In Russ.). 14. Logvin V. A., Tereshko I. V., Sheptunov S. A. Ispol’zovanie tleyushchego razryada dlya izmeneniya dislokatsionnoi struktury bystrorezhushchei stali [Use of glow discharge to modify the dislocation structure of high-speed steel]. Naukoemkie tekhnologii v mashinostroenii [Science Intensive Technologies in Mechanical Engineering], 2018, No. 12, pp. 21-27. (In Russ.). 15. Logvin V. A., Tereshko I. V., Sheptunov S. A. Izmenenie dislokatsionnoi struktury metallov posle vozdeistviya tleyushchego razryada [Change in the dislocation structure of metals after glow discharge exposure]. Metalloobrabotka [Metalworking], 2018, No. 6, pp. 45-51. (In Russ.). 16. Logvin V. A. Formirovanie spektra energeticheskogo vozdeistviya plazmy tleyushchego razryada v avtomatizirovannoi tekhnologicheskoi srede [Formation of the energy impact spectrum of glow-discharge plasma in an automated technological environment]. Perspektivnye napravleniya razvitiya tekhnologii mashinostroeniya i metalloobrabotki: tezisy dokladov 34-i Mezhdunarodnoi nauchno-tekhnicheskoi konferentsii (Minsk, 28 marta 2019 g.) [Prospective directions for the development of mechanical engineering and metalworking technologies: abstracts o f the 34th International Scientific and Technical Conference]. Minsk, Biznesofset, 2019, pp. 115-116. (In Russ.). 17. Logvin V. A., Yakhutlov U. M. Using photodiodes and inductive sensors in the automated control system and management quality when processing tools in a glow discharge. Proceedings o f the 2017 International Conference “Quality Management, Transport and Information Security, Information Technologies” (IT&QM&IS), 2020. Информация об авторах A. А. Татарканов — соискатель; B. А. Логвин — кандидат технических наук, доцент кафедры «Металлорежущие станки и инструменты»; C. А. Шептунов — доктор технических наук, профессор, директор. Information about the authors A. A. Tatarkanov — Applicant; V. A. Logvin — PhD (Engineering), Associate Professor of the Department of Metal-Cutting Machines and Tools; S. A. Sheptunov — Dr. Sc. (Engineering), Professor, Director. Статья поступила в редакцию 05.03.2026; одобрена после рецензирования 27.05.2026; принята к публикации 27.05.2026. The article was submitted 05.03.2026; approved after reviewing 27.05.2026; accepted for publication 27.05.2026.