Труды КНЦ. Технические науки. – 2026. - № 2

7. Surface morphology and in-depth compositional analysis of Al-Mn alloy films / E. Tashlykova-Bush [et al.] // Vacuum. 2023. Vol. 208. P. 111559. 8. Gorbachev N. S., Malyshev A. A. Hidden interface defects as dominant failure factor in dielectric stacks // Appl. Surface Sci. 2022. Vol. 592. P. 153347. 9. Кузьмина Е. Н., Ташлыкова Н. А., Бушмаринов И. А. Анализ неоднородностей Al-Mn покрытий после ионной имплантации // Поверхность. 2023. № 3. С. 69-74. 10. ЛогвинВ . А. Формирование спектраэнергетического воздействия плазмытлеющего разряда в автоматизированной технологической среде // Перспективные направления развития технологий машиностроения и металлообработки: тез. докл. 34-й Междунар. науч.-техн. конф. (Минск, 28 марта 2019 г.) / отв. ред. В. К. Шелег. Минск: Бизнесофсет, 2019. С. 115-116. 11. Logvin V. A., Yvarova L. A. Simulation of the processing process in a glow discharge plasma generator // EPJ Web of Conferences. 2021. Vol. 248. P. 01006. D0I:10.1051/epjconf/202124801006 12. Fancey K. A coating thickness uniformity model for physical vapour deposition systems: overview // Surface and Coatings Technology. 1995. Vol. 71, No. 1. P. 16-29. 13. Simulation and optimization of film thickness uniformity in physical vapor deposition / B . Wang [et al.] // Coatings. 2018. Vol. 8, No. 9. P. 325. D0I:10.3390/coatings8090325 14. Doluk E., Rudawska A., Miturska Baranska I. Investigation o f the surface roughness and surface uniformity o f a hybrid sandwich structure after machining // Materials. 2022. Vol. 15, No. 20. P. 7299. D01:10.3390/ma15207299 15. Approach to heterogeneous surface roughness evaluation for coating purposes / D. Vinarski [et al.] // Coatings. 2024. Vol. 14, No. 4. P. 471. D0I:10.3390/coatings14040471 16. A comprehensive review o f surface modification techniques for enhancing the biocompatibility o f 3D printed titanium implants / S. Long [et al.] // Coatings. 2023. Vol. 13, No. 11. P. 1917. D0I:10.3390/coatings13111917 17. Application of advanced surface modification techniques in titanium-based implants: latest strategies for enhanced antibacterial properties and osseointegration / P. Yuan [et al.] // J. Mater. Chem. B. 2024. Vol. 12. P. 10516-10549. D0I:10.1039/D4TB00455F 18. Improvement o f tablet coating uniformity using QbD principles / A. Dubey [et al.] // AAPS PharmSciTech. 2012. Vol. 13, No. 3. P. 1005-1012. 19. Motamen S., Vahabi M., Jafari G. R. Effects of coating rate on morphology of copper surfaces // arXiv. 2013. arXiv:1301.4636. 20. Dahlstrom C. Quantitative microscopy of coating uniformity. Uppsala, Sweden: Uppsala University, 2012. 58 p. 21. Baron M. Numerical modelling for retrieval of coating thickness and uniformity from reflectance // 0ptics Express. 2023. Vol. 31, No. 20. P. 32968-32984. 22. Study of tablet-coating parameters using D 0E methodology / B. Kandela [et al.] // Powder Technol. 2010. Vol. 207. P. 418-426. References 1. Chernyshev V. L., Kuznetsov A. Yu., Gnedin S. P. Poverkhnostnye tekhnologii v mashinostroenii [Surface technologies in mechanical engineering]. Moscow, Mashinostroenie, 2021, 328 p. 2. Bugaenko V. L., Larionov A. N., Mazurov Yu. N. Problemy nadezhnosti pretsizionnykh uzlov pri ionnoi modifikatsii [Reliability problems of precision units under ion modification]. Trenie i iznos [Friction and Wear], 2020, Vol. 41, No. 2, pp. 139-144. (In Russ.). 3. Zhang L., Xu C., Li X. Surface quality control in plasma-enhanced precision assemblies. J. Mater. Proces. Technol., 2021, Vol. 296, рp. 117235. 4. Aliev A. N., Gorbunov A. V., Samsonov V. M. Metody otsenki odnorodnosti pokrytii v nanomasshtabe [Methods for evaluating coating uniformity at the nanoscale]. Poverkhnost'. Rentgenovskie, sinkhrotronnye i neitronnye issledovaniya [J. Surface Investigation. X-ray, Synchrotron and Neutron Techniques], 2022, No. 5, pp. 45-52. (InRuss.). 5. Sharma P., Gupta D., Tiwari A. Statistical models for uniformity analysis of functional coatings. Surface and Coatings Technology, 2023, Vol. 462, рp. 129451. 6. Liu Q., Zhao Z., Chen Y. Failure analysis of nanoscale multilayers in MEMS structures. Microelectronic Reliability, 2020, Vol. 110, рp. 113658. 7. Tashlykova-Bush E. et al. Surface morphology and in-depth compositional analysis of Al-Mn alloy films. Vacuum, 2023, Vol. 208, рp. 111559. 8. Gorbachev N. S., Malyshev A. A. Hidden interface defects as dominant failure factor in dielectric stacks. Appl. Surface Sci., 2022, Vol. 592, рp. 153347.